Tuning effect of inert gas mixing on electron energy distribution function in inductively coupled discharges
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Nuclear Energy and Engineering
Link
http://stacks.iop.org/0741-3335/48/i=1/a=006/pdf
Reference27 articles.
1. Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma
2. Electron energy distribution functions and the influence on fluorocarbon plasma chemistry
3. Measurements of the electron energy distribution function in molecular gases in an inductively coupled plasma
4. Measurements of neutral and ion composition, neutral temperature, and electron energy distribution function in a CF4 inductively coupled plasma
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