Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference10 articles.
1. Electron temperature control with grid bias in inductively coupled argon plasma
2. Tailoring of electron energy distributions in low-pressure inductive discharges
3. The finite size effect in a planar inductively coupled plasma
4. Electron energy distribution functions in He/N2 mixtures in the presence of metastable states
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