Microstructural and Electrical Properties of ZrO 2 Thin Films Prepared on silicon on Insulator with Thin Top silicon
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference16 articles.
1. The Influence of the Buried Oxide Defects on the Gate Oxide Reliability and Drain Leakage Currents of the Silicon-on-Insulator Metal-Oxide-Semiconductor Field-Effect Transistors
2. Ion-cut silicon-on-insulator fabrication with plasma immersion ion implantation
3. Ultrathin-body SOI MOSFET for deep-sub-tenth micron era
4. Thermal stability of ultrathin ZrO2 films prepared by chemical vapor deposition on Si(100)
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation;Materials Today Advances;2023-12
2. Innovative Process to Obtain Thin Films and Micro-Nanostructured Zrn Films from a Photo-Structurable Zro2 Sol-Gel Using Rapid Thermal Nitridation;2023
3. Yttria stabilized zirconia solid electrolyte surface modification with ZrO2, Y2O3, and ZrO2 + 9 mol % Y2O3 films;Russian Journal of Electrochemistry;2010-07
4. Annihilation Solitons and Chaotic Solitons for the (2+1)-Dimensional Breaking Soliton System;Communications in Theoretical Physics;2007-10
5. Development of Structure-Property Relationships in Disordered Zirconia Thin Films for High Energy Density Mim Capacitors;MRS Proceedings;2006
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3