Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/28/3/038101/pdf
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1. Electrostatic-comb drive of lateral polysilicon resonators
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3. Experimental investigation of an embedded root method for stripping SU-8 photoresist in the UV-LIGA process
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