Simulation and Suppression of the Gas Phase Pre-reaction in Metal-Organic Chemical Vapor Deposition of ZnO
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/28/11/116803/pdf
Reference22 articles.
1. Electrical properties of bulk ZnO
2. Investigation of ZnO nanopillars fabrication in a new Thomas Swan close coupled showerhead MOCVD reactor
3. CLOSE-COUPLED SHOWERHEAD MOCVD TECHNOLOGY FOR THE EPITAXY OF GaN AND RELATED MATERIALS
4. Fundamental models of the metalorganic vapor-phase epitaxy of gallium nitride and their use in reactor design
5. Core/Multishell Nanowire Heterostructures as Multicolor, High-Efficiency Light-Emitting Diodes
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The Synthesis and Characterization of Peach-Like ZnO;Chinese Physics Letters;2012-12
2. Mutually beneficial doping of tellurium and nitrogen in ZnO films grown by metal-organic chemical vapor deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-09
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