A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks-Reference-Cited by-同舟云学术

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A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks

Published:2017-02 Issue:2 Volume:34 Page:025101
ISSN:0256-307X
Container-title:Chinese Physics Letters
language:
Short-container-title:Chinese Phys. Lett.

Author:

Zhang Le-Min,Jiao Bin-Bin,Yun Shi-Chang,Kong Yan-Mei,Ku Chih-Wei,Chen Da-Peng

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

https://iopscience.iop.org/article/10.1088/0256-307X/34/2/025101/pdf

Reference18 articles.

1. High performance Pirani vacuum gauge

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Efficient and Accurate System-Level Simulation Compatible Macromodel for MEMS Diode-Based Micro-Pirani Vacuum Sensor;IEEE Sensors Journal;2024-08-01

2. Micro-Pirani Pressure Sensor With Operation Range Beyond Atmospheric Pressure Based on Aligned Carbon Nanotube Films;IEEE Electron Device Letters;2024-05

3. Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor;Journal of Microelectromechanical Systems;2024-04

4. Enhancement of thermal rectification by asymmetry engineering of thermal conductivity and geometric structure for multi-segment thermal rectifier;Chinese Physics B;2023-06-01

5. Overview of the MEMS Pirani Sensors;Micromachines;2022-06-14

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