Low Power and High Sensitivity MOSFET-Based Pressure Sensor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/29/8/088501/pdf
Reference9 articles.
1. The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor
2. Gradient heat flux sensors for high temperature environments
3. A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors
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3. Barometric Pressure Sensor with Air Pocket Integrated with MOSFETs on the Same Substrate;JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE;2020-06-30
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