Evolution of Structural Defects in SiO x Films Fabricated by Electron Cyclotron Resonance Plasma Chemical Vapour Deposition upon Annealing Treatment
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/25/3/062/pdf
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3. Strong ultraviolet photoluminescence from silicon oxide films prepared by magnetron sputtering
4. Room‐temperature visible photoluminescence from silicon‐rich oxide layers deposited by an electron cyclotron resonance plasma source
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