Wafer-Scale Flexible Surface Acoustic Wave Devices Based on an AlN/Si Structure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/30/7/077701/pdf
Reference23 articles.
1. All-organic active matrix flexible display
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4. Fabrication of Flexible Transducer Arrays With Through-Wafer Electrical Interconnects Based on Trench Refilling With PDMS
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