Modelling of vertical electrostatic comb‐drive for scanning micromirrors

Abstract

PurposeThe main aim of this paper is to build an equivalent circuit model of a comb drive microactuator, while the phenomenon of generating the electric fringing field at electrode edges is taken into consideration.Design/methodology/approachThe approach to the comb drives design requires the “leakage capacitance” (appearing at electrode edges) to be introduced to the complex equivalent circuit model. Introducing these capacitances leads to defining the circuit model properly.FindingsSuch a complex approach by use of the equivalent circuits model could make it possible to reduce the discrepancy between the field and circuit models. These results were obtained after comparing both field and circuit models.Originality/valueMEMS microdrives are in the area which is being developed very dynamically. Improvements in the mathematical models would permit more precise microdrive design, leading to optimal structure.