A novel PVDF microforce/force rate sensor for practical applications in micromanipulation
Author:
Shen Yantao,Xi Ning,Lai King W.C.,Li Wen J.
Abstract
This paper presents our development of a novel force and force rate sensory system to advance applications in micromanipulation using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. To allow close monitoring of magnitude and direction of microforces acting on microdevices during manipulation, PVDF ploymer films are used to fabricate highly sensitive 1D and 2D sensors to detect real‐time microforce and force rate information during the manipulation process. The sensory system with a resolution in the range of sub‐micronewtons can be applied effectively to develop a technology on the force‐reflection microassembly of surface MEMS structures. In addition, a tele‐micromanipulation platform, which can be used to perform tele‐microassembly of the MEMS structures and tele‐cell‐manipulation with force/haptic feedback via Internet was also built successfully.
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering
Reference25 articles.
1. Arai, F., Nonoda, Y., Fukuda, T. and Ooda, T. (1996), “New force measurement and micro grasping method using laser raman spectrophotometer”, Proceedings of 1996 IEEE International Conference on Robotics and Automation, pp. 2220‐5. 2. Benech, P., Chamberod, E. and Monllor, C. (1996), “Acceleration measurement using PVDF”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 43 No. 5, pp. 838‐43. 3. Böhringer, K.F., Fearing, R.S. and Goldberg, K.Y. (1999), “Microassembly”, in Shimon, Nof (Ed.), The Handbook of Industrial Robotics, 2nd ed., Wiley, New York, NY, pp. 1045‐66. 4. Carrozza, M., Eisinberg, A., Menciassi, A., Campolo, D., Micera, S. and Dario, P. (2000), “Towards a force‐controlled microgripper for assembling biomedical microdevices”, J. Micromech. Microeng., Vol. 10, pp. 271‐6. 5. Cohn, M.B., Böhringer, K.F., Novorolski, J.M., Singh, A., Keller, C.G., Goldberg, K.Y. and Howe, R.T. (1998), “Microassembly technologies for MEMS”, Proceedings of SPIE Conference on Micromachining and Microfabrication, Invited paper/plenary session.
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
|
|