Microassembly technologies for MEMS
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SPIE
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Size Changing Soft Modules for Temperature Regulated Self-assembly and Self-disassembly;2022 IEEE 5th International Conference on Soft Robotics (RoboSoft);2022-04-04
2. Effects of cutout and thermal environment on vibration of FG cylindrical micropanels based on the three-dimensional MCST;Journal of the Brazilian Society of Mechanical Sciences and Engineering;2021-04-03
3. Acousto-fluidic system assisting in-liquid self-assembly of microcomponents;Journal of Micromechanics and Microengineering;2013-11-14
4. A Mechanism Approach for Enhancing the Dynamic Range and Linearity of MEMS Optical Force Sensing;Signal Measurement and Estimation Techniques for Micro and Nanotechnology;2011
5. Interfacial-Energy-Controlled Deposition Technique of Microstructures Using Blade-Coating;The Journal of Physical Chemistry B;2009-10-27
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