Through-focus scanning optical microscopy measurement based on machine learning-Reference-Cited by-同舟云学术

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Through-focus scanning optical microscopy measurement based on machine learning

Published:2022 Issue:4 Volume:15 Page:703-711
ISSN:2097-1842
Container-title:Chinese Optics
language:en
Short-container-title:zggx

Author:

Guan-nan LI, ,Jun-kai SHI,Xiao-mei CHEN,Chao GAO,Xing-jian JIANG,Cheng-jun CUI,Qiang ZHU,Shu-chun HUO,Wei-hu ZHOU, ,

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Link

http://www.chineseoptics.net.cn/article/pdf/preview/10.37188/CO.2022-0009.pdf

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. MEMS High Aspect Ratio Trench Three-Dimensional Measurement Using Through-Focus Scanning Optical Microscopy and Deep Learning Method;Applied Sciences;2022-08-23

4. 微结构显微光学无损检测方法（特邀）;ACTA PHOTONICA SINICA;2022

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