Physics-based virtual coherence scanning interferometer for surface measurement

Author:

Su Rong,Leach Richard

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Subject

General Medicine

Reference50 articles.

1. Leach, R. K. Fundamental Principles of Engineering Nanometrology. (Oxford: Elsevier, 2014).

2. Malshe, A. P. et al. Bio-inspired textures for functional applications. CIRP Annals 67, 627-650 (2018).

3. Karkantonis, T. et al. Femtosecond laser-induced sub-micron and multi-scale topographies for durable lubricant impregnated surfaces for food packaging applications. Surface and Coatings Technology 399, 126166 (2020).

4. Gray, R. Covid-19: How long does the coronavirus last on surfaces? Preprint at https://www.wired.com/story/how-long-does-the-coronavirus-last-on-surfaces/ (2020).

5. ISO 25178-600 2019. Geometrical Product Specifications (GPS) – Surface Texture: Areal – Part 600: Metrological Characteristics for Areal-topography Measuring Methods (Geneva: International Organization for Standardization).

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