In-process monitoring in laser grooving with line-shaped femtosecond pulses using optical coherence tomography
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Publisher
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Link
https://www.light-am.com/article/pdf/preview/10.37188/lam.2022.033.pdf
Reference27 articles.
1. Bovatsek, J. M. & Patel, R. S. Highest-speed dicing of thin silicon wafers with nanosecond-pulse 355nm q-switched laser source using line-focus fluence optimization technique. Proceedings of SPIE 7585, Laser-based Micro- and Nanopackaging and Assembly IV. San Francisco: SPIE, 2010, 75850K.
2. Rung, S. et al. Laserscribing of thin films using top-hat laser beam profiles. JLMN-Journal of Laser Micro/Nanoengineering 8, 309-314 (2013).
3. Račiukaitis, G. et al. Laser processing by using diffractive optical laser beam shaping technique. JLMN-Journal of Laser Micro/Nanoengineering 6, 37-43 (2013).
4. Wa ng, Y. Z. & Lin, J. Characterization of the laser cleaving on glass sheets with a line-shape laser beam. Optics & Laser Technology 39, 892-899 (2007).
5. Döring, S. et al. In situ imaging of hole shape evolution in ultrashort pulse laser drilling. Optics Express 18, 20395-20400 (2010).
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