Group work of distributed microactuators

Abstract

SUMMARYThis paper proposes and demonstrates a method toobtain macroscopic work out of distributed microactuatorsfabricated by IC-compatible micromachiningprocesses. We have coordinated the simple and smallmotion of microactuators in order to perform a task. Theconcept and a control scheme are discussed first. In orderto show the feasibility, the fabrication and operation ofarrayed microactuators for conveyors are described. One uses thermally driven cantilevers and the other uses controlled air flow from micronozzles to carry flat objects.