Electron Irradiation Cleaning of the SEM and its Samples
Author:
Publisher
Cambridge University Press (CUP)
Subject
Instrumentation
Reference5 articles.
1. 2. The Scanning Electron Microscope Contamination Assessment Reference Sample (SEMCARS) is available for free through a cooperation with NIST, contact the author at andras@nist.gov
2. Contamination Mitigation Strategy for Ultra-Low Energy Electron Microscopy and Spectroscopy
3. 3. Sparkle EC of Hitachi High-Technologies Canada, Inc. https://www.hitachi-hightech.com/ca/
4. Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
5. Active monitoring and control of electron-beam-induced contamination
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