Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-018-20537-4.pdf
Reference34 articles.
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4. Popova, I., Zhukov, V. & Yates, J. T. Jr. Electron-stimulated conversion of chemisorbed O to Al2O3 on Al (111). Appl. Phys. Lett. 75, 3108–3110 (1999).
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