On the Calculation of SEM and FIB Beam Profiles
Author:
Publisher
Cambridge University Press (CUP)
Subject
Instrumentation
Reference11 articles.
1. The authors acknowledge funding from FR-TI2/736 (MOREMIT) and the European Regional Development Fund (CEITEC-CZ.1.05/1.1.00/02.0068).
2. Metrics of resolution and performance for CD-SEMs
3. Quantitative aberration assessment by a through focal analysis of pattern edge sharpness
4. Study on current density distribution of electron beam spots by wave optics theory
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