Optical Modulator P/N Junction Mapping by Electron Holography and Scanning Capacitance Microscopy-Reference-Cited by-同舟云学术

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Optical Modulator P/N Junction Mapping by Electron Holography and Scanning Capacitance Microscopy

Published:2018-08 Issue:S1 Volume:24 Page:1464-1465
ISSN:1431-9276
Container-title:Microscopy and Microanalysis
language:en
Short-container-title:Microsc Microanal

Author:

Wang Y. Y.,Nxumalo J.,Jeon J.,Barton K.,Nummy K.

Publisher

Cambridge University Press (CUP)

Subject

Instrumentation

Reference5 articles.

1. Lateral dopant profiling on a 100 nm scale by scanning capacitance microscopy

2. Variable magnification dual lens electron holography for semiconductor junction profiling and strain mapping

3. Two-Dimensional Mapping of the Electrostatic Potential in Transistors by Electron Holography

4. Off-axis electron holography with a dual-lens imaging system and its usefulness in 2-D potential mapping of semiconductor devices

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