Results from a New Fast, High Sensitivity, Eels Spectrometer

Abstract

Last year we discussed the performance of a new parallel EELS spectrometer, the ENFINA™. The spectrometer optics have been considerably improved over past designs and the detector changed from a photodiode to a charge coupled device that was designed specifically for spectroscopy. in this work we present application examples that demonstrate some of the capabilities of the ENFINA™.STEM spectrum imaging requires a spectrometer of high speed and sensitivity if useful data is to be collected in a short period of time. The ENFINA™spectrometer achieves both of these through a radically improved point spread function, increased sensitivity, and fast detector readout. Useful spectrum images can be acquired in a few minutes. Figure 1 shows a dark-field STEM image of a typical semiconductor. A spectrum image containing 190 x 150 spectra was acquired from within the marked area.