A New High Performance Detector for Electron Energy Loss Spectroscopy

Abstract

The serial detectors traditionally used in Electron Energy Loss Spectroscopy (EELS) have mostly been replaced by parallel detection systems, for reasons of efficiency and ease of use. So far most parallel detection systems have been based on fiber or lens coupled Photo Diode Array (PDA). Although these systems have proven satisfactory they have some limitations: 1) high readout noise, 2) limited correction for gain variations and 3) point spread function or cross talk between channels all of which effects the ultimate sensitivity and resolution. This paper discusses a newly developed parallel detector for EELS based on a CCD and a new type of scintillator and fiber technology. The new detector shows large improvements in all areas of performance.The sensitivity of a detector is limited by the readout noise at low incident electron dose and the gain correction at high dose. Both these areas have been addressed in the new design. The readout noise is equivalent to approximately 1/2 a primary electron, about 40 times better than a typical PDA.