X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines

Author:

Zaluzec Nestor J1ORCID

Affiliation:

1. Photon Sciences Directorate, Argonne National Laboratory , Lemont, IL , USA

Abstract

Abstract Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.

Funder

US Department of Energy

Publisher

Oxford University Press (OUP)

Subject

Instrumentation

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4. The design of an aberration corrected electron spectrometer for the TEM;Egerton;Optic,1980

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