X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines

Abstract

Abstract Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.