A Three-Dimensional Reconstruction Algorithm for Scanning Transmission Electron Microscopy Data from a Single Sample Orientation

Author:

Brown Hamish G1ORCID,Pelz Philipp M12,Hsu Shang-Lin12,Zhang Zimeng2,Ramesh Ramamoorthy23,Inzani Katherine45,Sheridan Evan456,Griffin Sinéad M45,Schloz Marcel7,Pekin Thomas C7,Koch Christoph T7ORCID,Findlay Scott D8ORCID,Allen Leslie J9,Scott Mary C12,Ophus Colin1,Ciston Jim1

Affiliation:

1. Lawrence Berkeley National Laboratory National Center for Electron Microscopy Facility, Molecular Foundry, , Berkeley, CA 94720, USA

2. University of California Department of Materials Science and Engineering, , Berkeley, CA 94720, USA

3. University of California Department of Physics, , Berkeley, CA 94720, USA

4. Lawrence Berkeley National Laboratory Materials Sciences Division, , Berkeley, CA 94720, USA

5. Lawrence Berkeley National Laboratory Molecular Foundry, , Berkeley, CA 94720, USA

6. King's College London Theory and Simulation of Condensed Matter, Department of Physics, , The Strand, London WC2R 2LS, UK

7. Humboldt-Universität zu Berlin Department of Physics & IRIS Adlershof, , Newtonstraße 15, 12489 Berlin, Germany

8. School of Physics and Astronomy, Monash University , Clayton, VIC 3800, Australia

9. School of Physics, University of Melbourne , Parkville, VIC 3010, Australia

Abstract

Abstract Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data. We apply the approach to a lead iridate, PbIrO, and yttrium-stabilized zirconia, YZrO, heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction. We demonstrate that Pb–Ir atomic columns are visible in the uppermost layers of the reconstructed volume. We compare this approach to the alternative techniques of depth sectioning using differential phase contrast scanning transmission electron microscopy (DPC-STEM) and multislice ptychographic reconstruction.

Funder

Air Force Office of Scientific Research

Deutsche Forschungsgemeinschaft

Australian Research Council

U.S. Department of Energy

Publisher

Oxford University Press (OUP)

Subject

Instrumentation

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