Abstract
The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-Ångstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.
Publisher
Cambridge University Press (CUP)
Reference101 articles.
1. Shao-Horn, Y. , Croguennec, L. , Delmas, C. , Nelson, E.C. & O'Keefe, M.A. (2003).Atomic resolution of lithium in LiCoO2 .Nature Mater 2,464–467.
2. Yamasaki, J. , Sawada, H. & Tanaka, N. (2005).First experiments of selected area nano-diffraction from semiconductor interfaces using a spherical aberration corrected TEM.J Electron Microsc 54,123–126.
3. Van Dyck, D. , Op De Beeck, M. & Coene, W. (1993).A new approach to object wave-function reconstruction in electron microscopy.Optik 93,103–107.
4. Tee, W.J. , Smith, K.C.A. & Holburn, D.M. (1979).An automatic focusing and stigmating system for the SEM.J Phys E Sci Instrum 12,35–38.
5. Tanaka, N. , Yamasaki, J. , Usuda, K. & Ikarashi, N. (2003).First observation of SiO2/Si(100) interfaces by spherical aberration-corrected high-resolution transmission electron microscopy.J Electron Microsc 52,69–73.
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