Effect of Correction of the 3-Fold Astigmatism on HREM Lattice Imaging With Information Below 100 Pm

Abstract

High resolution electron microscopes with field emission sources opened the possibility to investigate solids on a 100 pm range. Either electron holograpy can be applied or an information limit that may even extend into a region below 100 pm can be exploited to reach this goal [1]. However, lens aberrations such as the three-fold astigmatism often complicate an image interpretation in the 100 pm range or even make it impossible [2]. On the other hand, there is growing need to understand physical processes at a mono-atomic level in order to further develop artificially structured materials such as nano-crystals, ceramic coatings or semiconductors. Commonly, such materials contain light elements like C, N, or O with bond lengths that are shorter than a typical 180 pm point resolution of a high resolution, electron microscope. The carbon-carbon distance of 150 pm is the shortest bond length value in crystalline solids. Moreover, any projection of a diamond lattice along a low index zone axis for lattice imaging leads to a reduced C-C distance.