Author:
Blom Douglas A.,Allard Lawrence F.,Mishina Satoshi,O'Keefe Michael A.
Abstract
The resolution-limiting aberrations of round electromagnetic lenses
can now be successfully overcome via the use of multipole element
“aberration correctors.” The installation and performance of a
hexapole-based corrector (CEOS GmbH) integrated on the probe-forming side
of a JEOL 2200FS FEG STEM/TEM is described. For the resolution of the
microscope not to be severely compromised by its environment, a new,
specially designed building at Oak Ridge National Laboratory has been
built. The Advanced Microscopy Laboratory was designed with the goal of
providing a suitable location for aberration-corrected electron
microscopes. Construction methods and performance of the building are
discussed in the context of the performance of the microscope. Initial
performance of the microscope on relevant specimens and modifications made
to eliminate resolution-limiting conditions are also discussed.
Publisher
Cambridge University Press (CUP)
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