Two-Dimensional Electromechanical Waves in Microelectromechanical Structures (MEMS) with a Nanoscale Gap
Author:
Publisher
Allerton Press
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Link
https://link.springer.com/content/pdf/10.3103/S8756699023030123.pdf
Reference8 articles.
1. E. G. Kostsov, ‘‘Ferroelectric-based electrostatic micromotors with nanometer gaps,’’ IEEE Trans. Ultrason., Ferroelectr. Freq. Control 53, 2294–2298 (2006). https://doi.org/10.1109/tuffc.2006.176
2. E. G. Kostsov, ‘‘Electromechanical energy conversion in the nanometer gaps,’’ Proc. SPIE 7025, 70251G (2008). https://doi.org/10.1117/12.802501
3. I. L. Baginsky and E. G. Kostsov, ‘‘Nanometer gap in electromechanical converters—A way to achieve an extremely high energy density,’’ Micromachines 10, 746 (2019). https://doi.org/10.3390/mi10110746
4. I. L. Baginsky, ‘‘Ultimate specific power of capacity electrostatic motors having metal–thin film ferroelectric design,’’ Optoelectron., Instrum. Data Process. 57, 297–302 (2021). https://doi.org/10.3103/S8756699021030031
5. E. G. Kostsov, A. I. Skurlatov, and A. M. Shcherbachenko, ‘‘Optoelectronic system for studying nanodisplacements of moving MEMS elements,’’ Optoelectron., Instrum. Data Process. 54, 397–404 (2018). https://doi.org/10.3103/S875669901804012X
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