<title>Electromechanical energy conversion in the nanometer gaps

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Electromechanical energy conversion in the nanometer gaps

Published:2008-03-03 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Kostsov E. G.

Publisher

SPIE

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Two-Dimensional Electromechanical Waves in Microelectromechanical Structures (MEMS) with a Nanoscale Gap;Optoelectronics, Instrumentation and Data Processing;2023-06

2. Ultimate Specific Power of Capacity Electrostatic Motors Having Metal–Thin Film Ferroelectric Design;Optoelectronics, Instrumentation and Data Processing;2021-05

3. Gigahertz MEMS Clock Generator;Optoelectronics, Instrumentation and Data Processing;2019-03

4. Optoelectronic System for Studying Nanodisplacements of Moving MEMS Elements;Optoelectronics, Instrumentation and Data Processing;2018-07

5. Fast-Response Electrostatic Actuator Based on Nano-Gap;Micromachines;2017-03-03

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