Study of the Mechanical Properties of Thin-Film Membranes Made of Oxide and Silicon Nitride
Author:
Publisher
Allerton Press
Subject
General Physics and Astronomy,Mechanics of Materials
Link
https://link.springer.com/content/pdf/10.3103/S002565442205017X.pdf
Reference21 articles.
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3. A. S. Savinykh, G. I. Kanel, and S. V. Razorenov, “Strength and failure of LK7 borosilicate glass under shock compression,” Tech. Phys. 55 (6), 839–843 (2010). https://doi.org/10.1134/S1063784210060150
4. Y. V. Zhilyaev, S. D. Raevskii, D. Z. Grabko, et al., “Bulk GaN layers grown on oxidized silicon by vapor-phase epitaxy in a hydride–chloride system,” Tech. Phys. Lett. 31 (5), 367–369 (2005). https://doi.org/10.1134/1.1931770
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