Study of the Effect of Radiation Exposure on Grain Size and Mechanical Properties of Thin-Film Aluminum

Author:

Dyuzhev N. A.,Gusev E. E.,Portnova E. O.,Makhiboroda M. A.

Publisher

Pleiades Publishing Ltd

Reference17 articles.

1. V. Udintsev, “Radiation-resistant ICs. Spaceward and Earth reliability,” Elektronika: Nauka Tekhn. Biznes, No. 5, 72–77 (2007).

2. G. D. Denim, P. P. Kim, and N. A. Dyuzhev, “Simulation of MEMS performance characteristics of a dynamic mask element with an electromechanical optical shutter for X-ray nanolithography,” in Proc. of XXVI Symposium “Nanophysics and Nanoelectronics” Nizhnii Novgorod, 2022, Vol. 1 (Nizhegorodsk. Gos. Univ. Im Lobachevskogo, 2022), pp. 543–544 [in Russian].

3. N. V. Kuznetsov, “Cross-section of single random failures of VLSI under the influence of heavy charged particles,” Vopr. Atom. Nauki Tekhn. Ser.: Fiz. Radiats. Vozd. Elektron. Apparat., No. 1–2, 52–55 (2007).

4. https://henke.lbl.gov/

5. N. A. Dyuzhev, E. E. Gusev, and M. A. Makhiboroda, “Study of the mechanical properties of thin-film membranes made of oxide and silicon nitride,” Mech. Solids 57, 1044–1053 (2022). https://doi.org/10.3103/S002565442205017X

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