Structural and optical studies of thin films of aluminum nitride grown via ion-plasma sputtering on gallium arsenide substrates with different orientations
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Published:2017-09
Issue:9
Volume:81
Page:1119-1126
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ISSN:1062-8738
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Container-title:Bulletin of the Russian Academy of Sciences: Physics
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language:en
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Short-container-title:Bull. Russ. Acad. Sci. Phys.
Author:
Seredin P. V.,Goloschapov D. A.,Lenshin A. S.,Ternovaya V. E.,Arsentyev I. N.,Bondarev A. D.,Tarasov I. S.
Subject
General Physics and Astronomy
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