Developing a forming lens for a low-voltage electron beam system with high resolution

Author:

Kazmiruk V. V.,Savitskaya T. N.

Publisher

Allerton Press

Subject

General Physics and Astronomy

Reference6 articles.

1. Kaz’miruk, V.V. and Savitskaya, T.N., J. Surface Invest.. X-ray, Synchrotron Neutron., 2009, vol. 3, no. 5, p. 781.

2. Lencova, B. and Zlamal, J., Electron Optical Design Program (EOD) Ver. 3.69, 2009.

3. Mullerova, I. and Frank, L., Adv. Imaging Electron Phys., 2003, vol. 128, pp. 309–443.

4. Lenc, M., in Proc. Multinational Congr. on Electron Microscopy, Ciampor, F., Ed., Bratislava: Slovak Acad. Press, 1995, pp. 103–104.

5. Lencova, B., Electrostatic Lenses. Handbook of Charged Particle Optics, Orloff, J., Ed., New York: CRC Press, 1997, pp. 117–221.

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1. Miniature Forming Lens for a High-Voltage Electron-Beam Lithography System;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2020-11

2. Control of electron-probe-system parameters using maps of the intensity distribution of the secondary-emission signal;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2014-11

3. Modifying a low-voltage electron probe system;Bulletin of the Russian Academy of Sciences: Physics;2014-09

4. Automating the mode of the electron-probe control of templates for imprint lithography;Bulletin of the Russian Academy of Sciences: Physics;2012-09

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