Control of electron-probe-system parameters using maps of the intensity distribution of the secondary-emission signal-Reference-Cited by-同舟云学术

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Control of electron-probe-system parameters using maps of the intensity distribution of the secondary-emission signal

Published:2014-11 Issue:6 Volume:8 Page:1240-1243
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Kazmiruk V. V.,Kurganov I. G.,Savitskaya T. N.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451014050073.pdf

Reference7 articles.

1. M. Watanabe, H. Shinada, A. Takafuji, M. Iizuka, Y. Gunji, K. Hayakawa, and M. Takeda, US Patent No. 7030394 B2 (USPTO Patent Full-Text and Image Database, 2006).

2. A. Yamada, US Patent No. 5198668 A (USPTO Patent Full-Text and Image Database, 1993).

3. P. J. Lawson, US Patent No. 4514634 A (USPTO Patent Full-Text and Image Database, 1985).

4. V. V. Kazmiruk and T. N. Savitskaya, Bull. Russ. Acad. Sci.: Phys. 76, 965 (2012).

5. V. V. Kazmiruk and T. N. Savitskaya, Bull. Russ. Acad. Sci.: Phys. 75, 1194 (2011).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Determination of the Beam-Focus Plane in a SEM by the Dependence of the Signal Contrast on the Potential of a Focusing Electrode;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2020-09

2. Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2017-03

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