Nb–Al–N thin films: Structural transition from nanocrystalline solid solution nc-(Nb,Al)N into nanocomposite nc-(Nb, Al)N/a–AlN-Reference-Cited by-同舟云学术

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Nb–Al–N thin films: Structural transition from nanocrystalline solid solution nc-(Nb,Al)N into nanocomposite nc-(Nb, Al)N/a–AlN

Published:2016-03 Issue:2 Volume:38 Page:103-113
ISSN:1063-4576
Container-title:Journal of Superhard Materials
language:en
Short-container-title:J. Superhard Mater.

Author:

Ivashchenko V. I.,Dub S. N.,Scrynskii P. L.,Pogrebnjak A. D.,Sobol’ O. V.,Tolmacheva G. N.,Rogoz V. M.,Sinel’chenko A. K.

Publisher

Allerton Press

Subject

Inorganic Chemistry,General Materials Science

Link

http://link.springer.com/content/pdf/10.3103/S1063457616020040.pdf

Reference27 articles.

1. Barnett, S.A., Madan, A., Kom, I., and Martin, K., Stability of nanometer-thick layers in hard coatings, MRS Bulletin, 2003, vol. 169, pp. 169–172.

2. Gotoh, Y., Nagao, M., Ura, T., Tsuji, H., and Ishikawa, J., Ion beam assisted deposition of niobium nitride thin films for vacuum microelectronics devices, Nucl. Instr. Methods Phys. Res. B, 1999, vol. 148, pp. 925–929.

3. Selinder, T.I., Miller, D.J., and Gray, K.E., Phase formation and microstructure of Nb1x AlxN alloy films grown on MgO (001) by reactive sputtering: a new ternary phase, Vacuum, 1995, vol. 46, pp. 1401–1406.

4. Makino, Y., Saito, K., Murakami, Y., and Asami, K., Phase change of Zr–Al–N and Nb–Al–N films prepared by magnetron sputtering method, Solid State Phenomena, 2007, vol. 127, pp. 195–200.

5. Barshilla, H.C., Deepthi, B., and Rajam, K.S., Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings, J. Mater. Res., 2008, vol. 23, pp. 1258–1268.

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