Author:
Lee Dasol,Kim Hyunjin,Pak Byeongjun,Kim Doyeon,Jeong Haedo,Lee Hyunseop
Subject
Surfaces, Coatings and Films,Mechanics of Materials
Reference12 articles.
1. Lee, H., Lee, D., and Jeong, H., Mechanical aspects of the chemical mechanical polishing process: a review, Int. J. Precis. Eng. Manuf., 2016, vol. 17, no. 4, pp. 525–536.
2. Totolin, V., Göcerler, H., Rodríguez Ripoll, M., and Jech, M., Tribo-electrochemical study of stainless steel surfaces during chemical-mechanical polishing, Lubr. Sci., 2016, vol. 28, no. 6, pp. 363–380.
3. Lee, S., Chen, Y., Liu, C.P., and Fan, T.J., Electrochemical mechanical polishing of flexible stainless steel substrate for thin-film solar cells, Int. J. Electrochem. Sci., 2013, vol. 8, no. 2, pp. 6878–6888.
4. Jiang, L., He, Y., Yang, Y., and Luo, J., Chemical mechanical polishing of stainless steel as solar cell substrate, ECS J. Solid State Sci. Technol., 2015, vol. 4, no. 5, pp. 162–170.
5. Park, B., Lee, H., Kim, Y., Kim, H., and Jeong, H., Effect of process parameters on friction force and material removal in oxide chemical mechanical polishing, Jpn. J. Appl. Phys., 2008, vol. 47, no. 12, pp. 8771–8778.
Cited by
12 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献