Sliding Mode and PID Control of a Dual Stage Actuator for Precision Positioning-Reference-Cited by-同舟云学术

Sliding Mode and PID Control of a Dual Stage Actuator for Precision Positioning

Published:2014 Issue:3 Volume:47 Page:6550-6555
ISSN:1474-6670
Container-title:IFAC Proceedings Volumes
language:en
Short-container-title:IFAC Proceedings Volumes

Author:

Ito Shingo,Steininger Juergen,Schitter Georg

Publisher

Elsevier BV

Subject

General Medicine

Reference17 articles.

1. A. Al Mamun, I. Mareels, T. H. Lee, and A. Tay. Dual stage actuator control in hard disk drive - a review. In The 29th Annual Conference of the IEEE Industrial Electronics Society, volume 3, pages 2132-2137, 2003.

2. A survey of models, analysis tools and compensation methods for the control of machines with friction;Armstrong-Hélouvry;Automatica,1994

3. Position control in lithographic equipment;Butler;IEEE Control Systems Magazine,2011

4. Sensing and control in optical drives;Chaghajerdi;IEEE Control Systems Magazine,2008

5. L. Guo, D. Martin, and D. Brunnett. Dual-stage actuator servo control for high density disk drives. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, pages 132-137, 1999.

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