High-precision Positioning System using a Low-stiffness Dual Stage Actuator-Reference-Cited by-同舟云学术

High-precision Positioning System using a Low-stiffness Dual Stage Actuator

Published:2013 Issue:5 Volume:46 Page:20-27
ISSN:1474-6670
Container-title:IFAC Proceedings Volumes
language:en
Short-container-title:IFAC Proceedings Volumes

Author:

Ito Shingo,Steininger Juergen,Chang Peter I.,Schitter Georg

Publisher

Elsevier BV

Subject

General Medicine

Reference27 articles.

1. Dynamic modeling and control of a piezo-electric dual-stage tape servo actuator;Boettcher;IEEE Transactions on Magnetics,2009

2. Position control in lithographic equipment [applications of control];Butler;Control Systems, IEEE,2011

3. Sensing and control in optical drives how to read data from a clear disc;Chaghajerdi;Control Systems, IEEE,2008

4. Active-passive hybrid actuators for tracking and focusing motions in optical pickup devices;Chan;International Conference on Mechatronics and Automation,2011

5. Master and slave control of a dual-stage for precision positioning;Chen;3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems,2008

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Variable step control to improve scanning speed of gene sequencing stage;Measurement and Control;2021-04-08

2. Development of a dual-stage and visual-servo filming robot;Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering;2021-02-14

3. Precision positioning control of a long-stroke stage employing multiple switching control;Microsystem Technologies;2020-01-28

4. Low-stiffness dual stage actuator for long rage positioning with nanometer resolution;Mechatronics;2015-08

5. Sliding Mode and PID Control of a Dual Stage Actuator for Precision Positioning;IFAC Proceedings Volumes;2014