High-Accuracy Atomic-Force-Microscope Head For Dimensional Metrology-Reference-Cited by-同舟云学术

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High-Accuracy Atomic-Force-Microscope Head For Dimensional Metrology

Published:2010 Issue:18 Volume:43 Page:227-231
ISSN:1474-6670
Container-title:IFAC Proceedings Volumes
language:en
Short-container-title:IFAC Proceedings Volumes

Author:

Amin-Shahidi D.,Ljubicic D.,Overcash J.,Hocken R.,Trumper D.

Publisher

Elsevier BV

Subject

General Medicine

Reference7 articles.

1. Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy;Akiyama;Review of Scientific Instruments,2003

2. Frequency modulation detection using high-q cantilevers for enhanced force microscope sensitivity;Albrecht;Journal of Applied Physics,1991

3. Dynamic atomic force microscopy methods;Garcia;Surface Science Reports,2002

4. Dynamics and control of the uncc/mit sub-atomic measuring machine;Hocken;CIRP Annals - Manufacturing Technology,2001

5. Analysis and Design of Magnetically-Suspended Precision Motion Control Stage;Holmes,1998

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Accuracy Atomic Force Microscope;Control Technologies for Emerging Micro and Nanoscale Systems;2011

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