Author:
Hocken R.J.,Trumper D.L.,Wang C.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference7 articles.
1. Linear motor-levitated stage for photolithography;Kim;Annals of the CIRP,1997
2. Design and analysis frame work for linear permanent-magnet machines;Trumper;IEEE Transactions on Industry Applications,1996
3. Analysis and Design of a Long range Scanning Stage;Holmes,1998
4. Analysis and Design of Magnetically-Suspended Precision Motion Control Stage;Holmes,1994
5. Atomic-scale precision motion stage (the angstrom stage);Holmes;Annals of The CIRP,1995
Cited by
37 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献