Multiscale modeling and optimization of an atomic layer deposition process for nanomanufacturing applications
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference12 articles.
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1. Artificial Neural Networks for dynamic optimization of stochastic multiscale systems subject to uncertainty;Chemical Engineering Research and Design;2020-09
2. Artificial Neural Network Discrimination for Parameter Estimation and Optimal Product Design of Thin Films Manufactured by Chemical Vapor Deposition;The Journal of Physical Chemistry C;2020-07-30
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