Review of Feedforward Approaches for Nano Precision Positioning in High Speed SPM Operation-Reference-Cited by-同舟云学术

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Review of Feedforward Approaches for Nano Precision Positioning in High Speed SPM Operation

Published:2008 Issue:2 Volume:41 Page:9221-9229
ISSN:1474-6670
Container-title:IFAC Proceedings Volumes
language:en
Short-container-title:IFAC Proceedings Volumes

Author:

Devasia Santosh

Publisher

Elsevier BV

Subject

General Medicine

Reference79 articles.

1. Scanning tunneling microscopy;Binnig;Helvetica Physica Acta,1982

2. Atomic force microscope;Binnig;Phys. Rev. Lett.,1986

3. L. Pao. A comparison of control architectures for atomic force microscopes. Keynote paper, Invited Session on Dynamics and Control of Micro- and Nanoscale systems-I, IFAC World Congress, 2008.

4. M. V. Salapaka. Systems and control approaches to nano-interrogation: Unraveling new temporal and spatial regimes. Keynote paper, Invited Session on Dynamics and Control of Micro- and Nanoscale systems-III, IFAC World Congress, 2008.

5. A survey of control issues in nanopositioning;Devasia;IEEE Transactions on Control Systems Technology,2007

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Application of adaptive inverse compensation feedforward—MPC feedback control to AFM piezoelectric micro-positioning platform;Smart Materials and Structures;2024-06-13

2. A comparison of control architectures for atomic force microscopes;Asian Journal of Control;2009-03

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