TRAJECTORY FOLLOWING AND REGULATION OF CHEMICAL BATCH REACTORS VIA GENEALOGICAL DECISION TREES

Author:

Ikonen E.,Gómez-Ramirez E.,Najim K.

Publisher

Elsevier BV

Subject

General Medicine

Reference22 articles.

1. Long-range predictive control of a rapid thermal processor;Bordeneuve;International Journal of Systems Science,1991

2. A learning approach of wafer temperature control in rapid thermal processing system;Choi;IEEE Transactions on Semiconductor Manufacturing,2001

3. Idempotency analysis and its applications;Del Moral,1997

4. Feynman-Kac Formulae - Genealogical and Interacting Particle Systems with Applications;Del Moral,2004

5. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities;Edgar;Automatica,2000

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