Author:
Verschuuren Marc A.,Megens Mischa,Ni Yongfeng,van Sprang Hans,Polman Albert
Abstract
AbstractReleasing the potential of advanced material properties by controlled structuring materials on sub-100-nm length scales for applications such as integrated circuits, nano-photonics, (bio-)sensors, lasers, optical security, etc. requires new technology to fabricate nano-patterns on large areas (from cm
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
68 articles.
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