The integrated curved surface imprinting process technology aided by gas and gray-scale regulated electromagnetic force

Abstract

Abstract This study proposes an integrated imprinting technology, of combining gas-aided imprinting technology and gray-scale, regulated, electromagnetic, force hot-imprinting technology, for the replication imprinting forming of the curved surface micro-nano structure. Based on the existing gas-aided hot imprinting forming technology, this study designed an electromagnetic disc that can regulate and control the imprinting force at different positions, and with features of even and precise control of gradual pressure. The electromagnetic disc was integrated with the gas and the electromagnetic force aided hot-imprinting technology to replicate micro-structure, to make the micro-nano imprinting technology and applications more mature. The experimental results showed that the proposed integrated imprinting technology can accurately replicate the curved surface micro-nano micro-structure.