Toward full three-dimensional (3D) high volume fabrication-Reference-Cited by-同舟云学术

Toward full three-dimensional (3D) high volume fabrication

Published:2019-05-23 Issue:3-4 Volume:8 Page:171-173
ISSN:2192-8584
Container-title:Advanced Optical Technologies
language:en
Short-container-title:

Author:

Kirchner Robert¹,Taniguchi Jun²

Affiliation:

1. Technische Universität Dresden, Faculty of Electrical and Computer Engineering, Institute of Semiconductors and Microsystems , 01062 Dresden , Germany

2. Tokyo University of Science , Department of Applied Electronics, Faculty of Industrial Science and Technology , Tokyo , Japan

Publisher

Walter de Gruyter GmbH

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference11 articles.

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3. T. Morita, R. Kometani, K. Watanabe, K. Kanda, Y. Haruyama, et al. J. Vac. Sci. Technol. B 21, 2737–2741 (2003).

4. J. D. Fowlkes, R. Winkler, B. B. Lewis, M. G. Stanford, H. Plank, et al. ACS Nano 10, 6163–6172 (2016).

5. D. Pires, J. L. Hedrick, A. De Silva, J. Frommer, B. Gotsmann, et al. Science 328, 732–735 (2010).

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