Automated discrimination of surface imperfections and adhered particles on customer-specific optical elements

Abstract

Abstract In previous work, we proposed an automated system, capable of detecting surface defects (e. g. edge chips, digs, scratches) on optical components as defined in the international standard ISO 10110-7. It objectively discriminates between defect classes and quantifies their geometrical size. During assessment of quality control at multiple manufacturers, the need for a method to discriminate between dust particles and surface imperfections has been identified. This article describes an approach to automatically assess dust particles and imperfections on the surface of interest based on the stereo vision approach.