Automatic inspection for surface imperfections: requirements, potentials and limits-Reference-Cited by-同舟云学术

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Automatic inspection for surface imperfections: requirements, potentials and limits

Published:2016-06-30 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Neubecker Ralph,Hon Jenny E.

Publisher

SPIE

Reference20 articles.

1. The scratch standard is only a cosmetic standard;Young,1989

2. The Truth About Scratch And Dig

3. Metrics for High-Quality Specular Surfaces

4. Developing a more useful surface quality metric for laser optics;Turchette,2011

5. Automated Inspection of Optics using ISO Specifications;Turchette,2012

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy;Sensors;2024-03-01

2. Wafer Map Defect Recognition and Accurate Localization Based on Defect Completion Algorithm;2023 IEEE International Conference on Cybernetics and Intelligent Systems (CIS) and IEEE Conference on Robotics, Automation and Mechatronics (RAM);2023-06-09

3. Effect of change in a normative approach on the evaluation of surface scratches on high-precision optical surfaces;Applied Optics;2022-02-22

4. Imaging simulation of a dark field imperfection evaluation arrangement for spherical optical surface based on reverse ray tracing;Optics Communications;2021-07

5. Simulation design of dark-field imaging scene for optical spherical surface imperfection based on raytracing;Optical Technology and Measurement for Industrial Applications 2020;2020-06-15

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