Ellipsometric inline inspection of dielectric substrates with nonplanar surfaces
Author:
Affiliation:
1. Fraunhofer Institute of Optronics, System Technologies and Image Exploitation IOSB , Karlsruhe , Germany
2. Karlsruhe Institute of Technology (KIT) , Vision and Fusion Laboratory (IES) , Karlsruhe , Germany
Abstract
Publisher
Walter de Gruyter GmbH
Subject
Electrical and Electronic Engineering,Instrumentation
Link
https://www.degruyter.com/document/doi/10.1515/teme-2019-0097/pdf
Reference19 articles.
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2. Rasheed Mohammed Abdel-Gawad Azzam and Nicholas Mitchell Bashara. Ellipsometry and polarized light. North-Holland personal library. Elsevier, Amsterdam, 4. impression, paperback ed. edition, 1999. ISBN 0-444-87016-4.
3. Chia-Wei Chen, Matthias Hartrumpf, Thomas Längle, and Jürgen Beyerer. Retroreflective ellipsotopometry. 8th International Conference on Spectroscopic Ellipsometry, 2019. URL https://congresses.icmab.es/icse8/.
4. Hiroyuki Fujiwara. Spectroscopic ellipsometry: Principles and applications. John Wiley & Sons, Chichester, England and Hoboken, NJ, 2007. ISBN 9780470060186. 10.1002/9780470060193.
5. Abhijeet Ghosh, Tongbo Chen, Pieter Peers, Cyrus A. Wilson, and Paul Debevec. Circularly polarized spherical illumination reflectometry. ACM Transactions on Graphics (TOG), 29 (6): 162, 2010. ISSN 4503-0439. 10.1145/1866158.1866163.
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