Novel technology for high precision, fast non-contact asphere metrology

Author:

Berger Gernot1,Petter Jürgen1

Affiliation:

1. Luphos GmbH, 55130 Mainz, Germany

Abstract

Abstract A method for non-contact optical profiling of aspheric surfaces is presented, which is based on multi wavelength interferometry (MWLI). The method yields high density 3D data at high accuracies in short measurement times. It measures aspheres without restrictions in terms of spherical departures. In addition, measurement of a large variety of special optics is enabled, segmented, ground, and discontinuuos optics. The measurement instrument can be used under production conditions.

Publisher

Walter de Gruyter GmbH

Subject

Electrical and Electronic Engineering,Instrumentation

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error correction;Optics Express;2023-03-30

2. Spiral scanning nano-profiler using normal vector tracing method;Review of Scientific Instruments;2022-12-01

3. Studies on the Metrological Need and Capabilities of 3D Scanning Technologies;Journal of Industrial Integration and Management;2022-11-25

4. High resolution, non-contact surface metrology for freeform optics in digital immersive displays;Optics and Photonics for Advanced Dimensional Metrology II;2022-05-20

5. Non-Contact 3D Metrology by Multi Wave-Length Interferometer;Journal of the Japan Society for Precision Engineering;2019-08-05

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