Novel technology for high precision, fast non-contact asphere metrology

Abstract

Abstract A method for non-contact optical profiling of aspheric surfaces is presented, which is based on multi wavelength interferometry (MWLI). The method yields high density 3D data at high accuracies in short measurement times. It measures aspheres without restrictions in terms of spherical departures. In addition, measurement of a large variety of special optics is enabled, segmented, ground, and discontinuuos optics. The measurement instrument can be used under production conditions.